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Lot 1.5 | Suss MicroTec / Karl Suss MA6/BA6 Mask Aligner

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Auction Details

Current Bid   ()
No Reserve   
Auction Ends Thursday, May 31, 2018 2:15:00 PM
Bid History 40 Bids
High Bidder e******i
Auction Started Wednesday, May 30, 2018 6:00:00 AM
Page Views 511 View Lots

Description

Suss MicroTec / Karl Suss MA6/BA6 Mask Aligner, Type: 12600083

  • Year of Manufacture 1996
  • Wafer Size: up to 6"/150mm Wafers (with proper chuck)
  • Configured for Topside and Backside Alignment (BSA)
  • Suss DVM6 Splitfield Microscope with Objectives: 5x, 10x, 25x (2 Sets)
  • UV400 Optics (for 365nm and 405nm exposure)
  • Power Supply
  • Capable of Hard, Soft, Vacuum, and Proximity Contact
  • Lamphouse
  • Vibration Isolation Table
  • 1 Vacuum Chuck Included
  • 1 Maskholder Included
  • System Power: 230V, 50/60Hz, Include Operations Manual

Additional Information
Location USA