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- Item ID # 10138673
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Description
CHA MK50 Liftoff Tool
The IC5 deposition controller is missing. It is missing the onboard 400 cryopump & compressor. It comes with a Ebara A10 S dry pump & SR10 ebeam power supply.
no electron beam guns
Details
- Location Mountain View, CA
Questions & Answers
Q:
Is the system functional? What options are inside the chamber (i.e.- ion mill, heaters, 1 or 6 pocket e-gun, etc.)? What size cryopump is on the system? Are there roughing pumps included?
posted by:
jsellers
7/23/2024 9:15 AM PT
A:
Description has been updated.
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