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  Lot # 6.4
Ended

CHA MK50 Liftoff Tool

Located in Mountain View, CA

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  • Item ID # 10138673
  • End Date
  • Start Date
 
Description

CHA MK50 Liftoff Tool

The IC5 deposition controller is missing. It is missing the onboard 400 cryopump & compressor. It comes with a Ebara A10 S dry pump & SR10 ebeam power supply.

no electron beam guns

 

 
Questions & Answers
Q: Is the system functional? What options are inside the chamber (i.e.- ion mill, heaters, 1 or 6 pocket e-gun, etc.)? What size cryopump is on the system? Are there roughing pumps included? posted by: jsellers 7/23/2024 9:15 AM PT
A: Description has been updated.
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