- Item ID # 10418741
- End Date Thursday, August 29, 2024 2:06 PM PT
- Start Date Wednesday, August 28, 2024 6:00 AM PT
GCA Waferstep 200. It is a 5X reduction wafer exposure tool designed for up to 200mm wafers
All operations are automated, including wafer loading (150mm wafers) and aligning, and reticle loading and aligning (5").Manual operation is also possible. Automatic wafer leveling provides optimum focus range.
The focus system uses broadband light and is repeatable to <0.2μm. Overlay is specified as <0.2μm using global alignment.All tool calibrations are performed automatically, and the focus system is compensated for lens heating and barometric shifts.
The GCA stepper is equipped with a Tropel 2235i i-line reduction lens, featuring a 22mm diameter field size and a numerical aperture (N/A) of 0.35.
Capabilities:
Cassette to Cassette Operation
Automatic Wafer Handler (set for 150mm wafers)
200mm Wafer Stage
5X Reduction i-line Lens
15mm Exposure Field (10mm best uniformity)
Automatic Wafer Leveling
Reticle Management System (up to 10 reticles)
INSITU Tool Setup
Smart Set Metrology Software
PC Control (emulation mode)
Solid State Hard Drive
- Location Medford, OR