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  Lot # 14.4
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Novellus Sabre XT Deposition System

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  • Item ID # 1342782
  • End Date
  • Start Date
 
Description

Novellus Sabre XT  Electro deposition tool 
 
Model: Sabre-XT  
 
Wafer Size: 200mm  
 
Integrated frame with three (3) Plating Modules and Phase 3 Anode Chamber  
 
200mm Clamshell Drive Unit  
 
196mm Clamshell Cup and Cone (Phase 1A Ceramic Cup)  
 
Pulse Plating Capability; Advanced Energy Pulse Power Supply  
 
Three Additive Dosing System with Nowpak  
 
Bath Chemistry control algorithm  
 
Central Bath Reservoir (150 L) servicing all three plating modules  
 
Three Post-Electrofill Modules; capable of Edge Bead Removal (EBR)  
 
5-chamber anneal capability: 50-400 C, H2/forming gas  
 
Brooks 4-axis atmospheric dual-end effector robot (process robot)  
 
Brooks Accutran front-end robot  
 
Main Power Panel  
 
Secondary containment with splash guards and leak detection  
 
Dual waste stream plumbing for dedicated plating solution reclaim and dilute rinse  
 
Pentium-based CPU  
 
Graphical User Interface (GUI)  
 
SECS/GEM compatibility  

 

 
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