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  Lot # 9.2

CHA 600 Evaporator with Cryo

Located in Camarillo, CA

Listing Image
  • Item ID # 4910177
  • End Date
  • Start Date
  • Sold

E-beam 6 pocket tool. Pockets are 6cc.

Planetary system, in the bell jar are 3ea  4” wafer domes.  Photo shown of the tooling is the 3” wafer domes, 3 each with custom tooling for working with rectangular substrates.


The evaporator has a good CTI-8 cryopump in it with the compressor 8200 series, the film thickness monitor, the shutter is manual and so is the lift for the bell jar. 

Granville Phillips Ion gauge readout, and built in regen module.  The roughing pump is also included.  Comes with some OEM manuals.


Tool will be palletized, wrapped, strapped and ready for shipment.


Located in Camarillo, CA

Questions & Answers
Q: Tool will be packed and i have to pay only shipping please let me know posted by: Narinder 2/24/2021 3:26 PM PT
A: Yes the tool will be palletized and wrapped ready for pickup.
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