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Description
AMAT P5000
∙ 2-chamber PECVD tool
∙ Upgraded to handle transparent wafers
∙ Chambers:
1. TEOS Undoped
2. Silane Oxide / Nitride
Fully automatic, cassette-to-cassette operation
Details
- Location Toledo, OH
Questions & Answers
Q:
I can see the only 2 Process chamber not 3 Chamber.
posted by:
soohany
11/24/2021 5:50 PM PT
A:
Our apologies, this was an incorrect description. It has been updated to show 2 chambers.
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