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  Lot # 1
Ended

AMAT P5000

Located in Toledo, OH

Listing Image
  • Item ID # 6447284
  • End Date
  • Start Date
  • Sold
 
Description

AMAT P5000

∙ 2-chamber PECVD tool 

∙ Upgraded to handle transparent wafers 

∙ Chambers: 

1. TEOS Undoped

2. Silane Oxide / Nitride

Fully automatic, cassette-to-cassette operation

 
Questions & Answers
Q: I can see the only 2 Process chamber not 3 Chamber. posted by: soohany 11/24/2021 5:50 PM PT
A: Our apologies, this was an incorrect description. It has been updated to show 2 chambers.
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