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- Sold
Description
Perkin Elmer 4450
∙ Completely rebuilt in 2006
o PLC controlled
o DeviceNet network
o HMI software with touchscreen interface
o Ferro-fluidic feedthroughs
o Re-designed sputtering head
∙ 3-target, “delta” configuration
∙ DC magnetron sputtering
∙ Setup for co-sputtering and reactive sputtering
∙ RF bias and substrate etching
∙ Loadlocked, semi-automatic operation
Details
- Location Toledo, OH
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