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  Lot # 4

Perkin Elmer 4450 Sputtering System

Located in Toledo, OH

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  • Item ID # 6447410
  • End Date
  • Start Date
  • Sold

Perkin Elmer 4450

∙ Completely rebuilt in 2006 

o PLC controlled 

o DeviceNet network 

o HMI software with touchscreen interface 

o Ferro-fluidic feedthroughs 

o Re-designed sputtering head 

∙ 3-target, “delta” configuration 

∙ DC magnetron sputtering 

∙ Setup for co-sputtering and reactive sputtering 

∙ RF bias and substrate etching 

∙ Loadlocked, semi-automatic operation

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