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  Lot # 9

SVG 8600 Photoresist Coat and Develop Track

Located in Toledo, OH

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  • Item ID # 6447620
  • End Date
  • Start Date
  • Sold


∙ Coater: 

o Automated dispense and softbake of 3 different resists o Pivoting dispense head 

o Backside EBR 

∙ Developer: 

o Automated aqueous developing of photoresist films o Moving develop head 

o Post-exposure bake and hard bake stations 

∙ Cassette to cassette 

∙ Upgraded to handle transparent wafers


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