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SVG 8600 Photoresist Coat and Develop Track
SVG 8600 Photoresist Coat and Develop Track 
Located in Toledo, OH

- Item ID # 6447620
- End Date
- Start Date
- Sold
Description
SVG
∙ Coater:
o Automated dispense and softbake of 3 different resists o Pivoting dispense head
o Backside EBR
∙ Developer:
o Automated aqueous developing of photoresist films o Moving develop head
o Post-exposure bake and hard bake stations
∙ Cassette to cassette
∙ Upgraded to handle transparent wafers
Details
- Location Toledo, OH
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