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Mattson Helios RTP

  • Item ID # 971169
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Description

Please contact Jesse Singh for information or to purchase: 

jesse.singh@fabexchange.com, +1 (408) 532-5713

 

 

Mattson Helios RTP #1

Wafer size: 300mm

Process: RTP Software versions: ● Sequencer - MCS1.5.2.1 ● Load port firmware - 5006-2702-0400 ● MMC - VxWorks 5.5.1 
Handling Module: ● Signal Tower – Front ● Wafer size - 300mm ● Configuration - 3xFOUP ● Carrier ID reader – Yes ● Sequencer – Yes ● License – Yes ● Ionizer – Yes ● Frequency Converter  - Yes ● Power Supply Ionizer  603N3 – Yes ● Linear Track Controller 616N3 - setting 550rpm ● Step Motor Linear Track   - Yes ● VGA Data Switch  625S1 – Yes ● Cooling Station Sensors  - Yes ● Supply Filter - CIP3 & quartz blade ● Robot Controller 616N1 – Yes ● Robot – Yes ● Upper arm & Lower arm – Yes ● Distribution Box  - Yes ● Potentiometer R603 (FFU) – Yes 
2x Process Module: ● Field Box – Yes ● IGBT Box – Yes ● Main Switch – Yes ● O2 sensor module – Yes ● O2 sensor display – Yes ● Reactor Door – Yes ● Door cylinder – Yes ● Pyro chiller – Yes ● Control Rack – Yes ● Filed Box Plate – Yes ● Connector plate – Yes ● Connector plate Control rack - Yes 
Gas box: O2 - 150 SLM, O2 - 2 SLM, O2 - 20 SCCM, O2 - 3 SCCM, O2 - 200 SCCM, O2 - 20 SLM N2 - 20 SLM, N2 - 150 SLM, N2 - 100 SLM, N2H2 - 104 SLM, H2 - 4 SLM, H2 – x, NH3 - x Ar – x, Ar - 150 SLM Sub-fab: ● 2x Blower – Yes ● Power rack - Yes

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