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TEL Trias Ti/TiN Metal CVD

  • Item ID # 971231
  • End Date
  • Start Date
Description

Please contact Jesse Singh for information or to purchase: 

jesse.singh@fabexchange.com, +1 (408) 532-5713

 

 

TEL Trias Ti/TiN Metal CVD

Wafer size: 300mm Vintage: 03/2002 
 
[Chamber A] Process: TiN Hard: SFD Gas(sccm): TiCl4(100), ClF3(500), N2(600/2000), NH3(5000), NH3(300), N2(600/2000), NH3(1000), N2(300)  
[Chamber B] Process: TiN Hard: SFD Gas(sccm): TiCl4(100), ClF3(500), N2(600/2000), NH3(5000), NH3(300), N2(600/2000), NH3(1000), N2(300)  
[Chamber C] Process: TiN Hard: SFD Gas(sccm): TiCl4(100), ClF3(500), N2(600/2000), NH3(5000), NH3(300), N2(600/2000), NH3(1000), N2(300)  
Missing or damaged parts: None reported 
Tool is currently located in an off-site warehouse. De-installation has been completed. Shipping brackets and kits will need to be supplied by the buyer.  

 

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