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  Lot # 20
Ended

TEL Trias Ti/TiN Chamber, Parts, Peripherals

  • Item ID # 971386
  • End Date
  • Start Date
 
Description

Please contact Jesse Singh for information or to purchase: 

jesse.singh@fabexchange.com, +1 (408) 532-5713

 

 

TEL Trias Ti/TiN Chambers

Wafer size: 300mm  

Chamber Only 
Chamber Qty: 2x TiN (PM3) 
Chamber Process type: SFD TiN    Gas Supply Config: 
Manual valve N*: Yes  
Regulator (N2-1/N2-2): Yes 
Regulator (N2-PF): Yes  
Regulator (Ar): Yes  
Pressure sensor (All gas line): No  
Filter (N2-PF): No  
Manual valve (Dry air line): Yes  
Filter (Dry air line): No  
Regulator (Dry air line): No  
Pressure sensor (Dry air line): No  
Pressure gauge (Dry air line): No    Chamber TEL TRIAS TIN  
1333Pa Manometor: Yes  
133kPa Capacitance manometer: Yes  
O-rings: Yes  
O-rings: Yes 
O-rings, Cubic Trap I/O: Yes  
Gate Valve (Slit Valve): Yes  
APC Valve: Yes 
Cubic Trap: Yes 
Vacuum valve(VEP1): Yes  
Vacuum valve(VEP2,3): Yes 
Pressure Gauge, exhaust system: Yes 
Flow Meter for cooling water: No 
Water Leak Sensor: Yes  
  
Gas Box Configuration 
Gas Stick 1: Yes 
Gas Stick 2: Yes 
Gas Stick 3: Yes 
Gas Stick 4: Yes 
Gas Stick 5: Yes 
Gas Stick 6: Yes 
Gas Stick 7: Yes 
Gas Stick 8: Yes  
DLI: Yes  
Heater Bottom Purge: Yes  
Air Operation Valves: Yes  
Gas Filters: Yes  
Regulators: Yes  
Gas lockout system: Yes  
Kit Parts:  
STAGE HEATER ASSY,ELPR STG HTR Ver2.4: Yes ( Ver2.5) 
TiN Shower Base: Yes  
"Includes PLATE SHOWER SPACER 300TIN S1, PLATE SHOWER HEAD 300TIN, BLOCK GAS DIFFUSION, SCREW LONG HEAD M6X15, SCREW M6X28, SPRING WASHER SPAK M6, TUBE GAS INLET 300TIN, WASHER FLAT..M6 MA22 RGLR: TiN Shower Plate TiN Shower Block"  
 

 

 
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